Analysis of minute objects about 100 μm in size was done with good sensitivity using a sample compartment type infrared microscopy system. The system also has an outstanding observation function which allowed smooth acquisition of clear images using the fine adjustment function of the Z axis. The function also enabled measurement of sample dimensions. Switching between transmittance, reflectance, and ATR measurement is easy on the SurveyIR, making it possible to select the measurement method that is most appropriate for each
sample. SurveyIR also features six aperture sizes which enable measurement according to the size of the sample. In cases where the sample size is a few dozen μm, use of an infrared microscope equipped with an MCT detector is recommended.