SolidSpec - 3700/3700DUV

Three Detector Systems with Large Sample Compartment

The SolidSpec-3700/3700DUV have large sample compartments which allow large samples to be measured without sample destruction. Its internal dimensions are 900W x 700D x 350H mm.

A sample maximum of 700W x 560D x 40H mm can be set in the sample compartment and an entire sample area of 12 inches or 310 x 310 mm sample is measurable by mounting the Automatic X-Y stage (option).
The vertical optical path makes it possible to perform transmission or reflection measurements of large samples keeping them horizontal.

Large sample compartment with automatic x-y stage

Large Sample Compartment with Automatic X-Y Stage

12 inch silicon wafer on automatic x-y stage

12 inch Silicon Wafer on Automatic X-Y Stage

Automatic Measurement

The Automatic X-Y stage developed for the SolidSpec-3700/3700DUV enables automatic measurements for the points specified in advance while maintaining the nitrogen gas purge.

Reflection spectra of SiO2 film on 12-inch silicon wafer

Reflection spectra of SiO2 film on 12-inch silicon wafer

Thickness of SiO2 film on 12-inch silicon wafer

Thickness of SiO2 film on 12-inch silicon wafer

For Research Use Only. Not for use in diagnostic procedures.

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