TOC-1000e S
On-Line TOC Analyzer for Ultrapure Water
Precision TOC Monitoring for Next-Generation Semiconductor Manufacturing
Advanced On-Line TOC Analysis for Ultrapure Water—Engineered for the Most Demanding Processes
In semiconductor manufacturing, even trace organic contamination can impact yield and device performance. As device geometries continue to shrink, ultrapure water quality standards are becoming increasingly stringent, especially for detecting hard-to-oxidize compounds such as urea. The Shimadzu TOC-1000e S On-Line TOC Analyzer is engineered specifically for these challenges, delivering highly sensitive, real-time TOC monitoring for ultrapure water systems. Developed with direct input from leading semiconductor manufacturers and backed by more than 50 years of Shimadzu expertise in TOC analysis, the TOC-1000e S ensures reliable contamination control, supports stable high-yield production, and helps protect the integrity of next-generation semiconductor processes.
Key Features
- High-sensitivity detection of hard-to-oxidize organic contaminants
- Fast response to contamination events
- High-visibility touch panel with intuitive, color-coded status indicators
- Only requires annual onsite maintenance for maximum uptime
- Supports a variety of data output formats and a web browser function
Quick Specs
| Measurement items | TOC |
|---|---|
| TOC measurement principle | UV oxidation-conductivity measurement method |
| Measurement range*1 | 0 to 500 μg/L |
| Detection limit*1 | 0.02 μg/L |
| Repeatability*1 | ±0.05 μg/L (when concentration is no greater than 1 μg/L) |
| Accuracy*1 | ±5% (500 μg/L sucrose) |
| Linearity*1 | R2 = 0.98 or greater (when measuring 250 μg/L in the 0-500 μg/L range) |
| Measurement cycle | 5 minutes, 10 minutes, 15 minutes, 30 minutes |
| External dimensions | 270 (W) × 180 (H) × 140 (D) mm |
| Weight | 3.0 kg |
- *1 The specifications apply when the oxidation time is set to 70 seconds.
Superior detection sensitivity for hard-to-oxidize compounds
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High Oxidation Capacity with Accurate Detection of Urea and Other Hard-to-Oxidize Compounds
Urea, a hard-to-oxidize organic contaminant, is difficult to detect and can generate ammonia gas that causes downstream process issues. Conventional on-line TOC analyzers often lack sufficient sensitivity to reliably identify such compounds. The Shimadzu TOC-1000e S overcomes this limitation with its Active-Path configuration, exposing samples to high-energy shortwave light from an excimer lamp to achieve highly sensitive detection of urea and other hard-to-oxidize organic compounds, ensuring superior ultrapure water quality.
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Industry-leading compact design and lightweight build
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Compact, Lightweight Design for Easy Installation and Seamless Transfer at Multiple Measurement Points
The TOC-1000e S combines a compact footprint with a lightweight 3 kg design for maximum installation flexibility. It supports desktop, or wall/pipe mounting with an optional bracket kit and allows easy on-site calibration using an optional vial sampler. Its portability enables quick relocation between measurement points and makes it an ideal backup instrument for use during the maintenance of other active TOC analyzers—delivering convenience without compromising performance.
User-friendly operation for an efficient workflow
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One-Year Maintenance-Free Operation with Easy On-Site Calibration
The TOC-1000e S minimizes maintenance with a simple configuration requiring parts replacement only once per year. The excimer lamp and pump head are easily accessed from the front and replaced without tools, reducing downtime and effort. Calibration and validation are conveniently performed on-site using an optional vial sampler and certified standard solutions.
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