SolidSpec - 3700i/3700i DUV
Three Detector Systems with Large Sample Compartment
The SolidSpec-3700i/3700i DUV have large sample compartments which allow large samples to be measured without sample destruction. Its internal dimensions are 900W x 700D x 350H mm.
A sample maximum of 700W x 560D x 40H mm can be set in the sample compartment and an entire sample area of 12 inches or 310 x 310 mm sample is measurable by mounting the Automatic X-Y stage (option).
The vertical optical path makes it possible to perform transmission or reflection measurements of large samples keeping them horizontal.
Large Sample Compartment with Automatic X-Y Stage
12 inch Silicon Wafer on Automatic X-Y Stage
The Automatic X-Y stage developed for the SolidSpec-3700i/3700i DUV enables automatic measurements for the points specified in advance while maintaining the nitrogen gas purge.
Reflection spectra of SiO2 film on 12-inch silicon wafer
Thickness of SiO2 film on 12-inch silicon wafer